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Process Control For Producing Particles in a Vacuum Disclosure Number: IPCOM000048626D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08

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Brunsch, A Ruh, WD Trippel, G [+details]


The size and density of particles 7 in the inert gas of vacuum chamber are measured and controlled by means of detector 5. The intensity and state of polarization of light 6, reflected according to the Tyndell effect, are measured perpendicularly to a strong light beam 1 incident on the cluster of particles 7. In comparator 8, the measured values are compared with desired values. By means of inert gas inlet valve 14 and HF source 9, respectively, the particle size and density or rate are adjusted.