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Chemically Prepared Oxide Free Surface For Nickel Iron Alloys

IP.com Disclosure Number: IPCOM000048637D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-09

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Gardner, MJ Prince, KE Wirtz, LH [+details]


This article concerns a specific method for preparing nickel-iron alloy foils for photoresist adhesion in connection with the processing of such foils for the fabrication of thin metal masks. Such masks are useful in photolithographic processes for producing and testing integrated circuit structures in other substrates.