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Final Passivation of Semiconductors

IP.com Disclosure Number: IPCOM000048765D
Original Publication Date: 1982-Mar-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Clark, HA Taylor, JE [+details]

Abstract

In this process, a fluorocarbon film is provided to passivate semi-conductors and/or reactively ion etched aluminum metallurgy.