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Browse Prior Art Database

Quartz Trench RIE Etch Stop

IP.com Disclosure Number: IPCOM000048782D
Original Publication Date: 1982-Mar-01
Included in the Prior Art Database: 2005-Feb-09

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Related People

Boyar, S Chang, K Chiu, GT Kitcher, JR [+details]


For multilayer metal interconnections in semiconductor devices, the quartz insulator surrounding the metal via-studs (connector) can be attacked severely during next quartz layer trench RIE (reactive ion etching).