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Generation of Vias in Polymide by Rapid Heating and Controlled Evaporation of Underlying Metallurgy with a Pulsed Laser

IP.com Disclosure Number: IPCOM000048880D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Bhattacharyya, A Hodgson, RT Perry, PB Ray, SK [+details]

Abstract

A focussed laser beam with very short pulses (10-50 ns) has been used to create vias in polyimide overlying a metallurgy layer by controlled surface evaporation of underlying metal.