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Tri-Potential Method for Testing Electrical Opens and Shorts in Multilayer Ceramic Packaging Modules

IP.com Disclosure Number: IPCOM000048883D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

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Related People

Chang, TP Coane, PJ Hohn, FJ Kern, D [+details]


A scanning electron beam is used to address test points on the top side of a multilayer ceramic packaging module at two different potentials, one for charging and one for detection, while a second beam, which can be a scanning beam or a flood beam, is used to charge the back side at a third potential.