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Browse Prior Art Database

Electrostatic Contamination Reduction

IP.com Disclosure Number: IPCOM000048913D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Stapper, CH [+details]

Abstract

This electrostatic contamination reduction technique provides an ultra pure atmosphere for semiconductor manufacturing areas through the use of electrostatic precipitating air filters in combination with ionized air in order to reduce defects in semiconductor devices caused by atmospherically borne particles.