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Electrostatic Contamination Reduction

IP.com Disclosure Number: IPCOM000048913D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue


Related People

Stapper, CH [+details]


This electrostatic contamination reduction technique provides an ultra pure atmosphere for semiconductor manufacturing areas through the use of electrostatic precipitating air filters in combination with ionized air in order to reduce defects in semiconductor devices caused by atmospherically borne particles.