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Method of Defining Josephson Junction Area

IP.com Disclosure Number: IPCOM000048964D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Kaiser, HD Long, DT Rothman, LB [+details]

Abstract

This article describes an improved method for forming the junction area of Josephson devices. The method features the use of a photoresist mask and a reactive ion etch to form holes in a blanket-deposited layer of SiO which overlays the Josephson base metal. Holes so made permit a more precise definition of the Josephson junction area.