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Browse Prior Art Database

Polysilicon Resistor Integrated Planar Design

IP.com Disclosure Number: IPCOM000048990D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Berndlmaier, E Hryckowian, JN [+details]

Abstract

Described herein is a fabrication technique to realize polysilicon resistors of both low and high sheet resistivity. The resultant planar planes.