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Static Free Semiconductor Carriers

IP.com Disclosure Number: IPCOM000049116D
Original Publication Date: 1982-May-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Gagne, M Halsted, C [+details]

Abstract

Semiconductor wafers have normally been stored in plastic carriers. However, it has been found that many defects can be caused in such wafers due to high static charges in such plastic carriers.