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Static Free Semiconductor Carriers Disclosure Number: IPCOM000049116D
Original Publication Date: 1982-May-01
Included in the Prior Art Database: 2005-Feb-09

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Gagne, M Halsted, C [+details]


Semiconductor wafers have normally been stored in plastic carriers. However, it has been found that many defects can be caused in such wafers due to high static charges in such plastic carriers.