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Semiconductor wafers have normally been stored in plastic carriers. However, it has been found that many defects can be caused in such wafers due to high static charges in such plastic carriers.
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Static Free Semiconductor Carriers
Semiconductor wafers have normally been stored in plastic carriers.
However, it has been found that many defects can be caused in such wafers due
to high static charges in such plastic carriers.
To avoid such high static charges and at the same time prevent the dispersal
of undesirable, conductive particles, carbon in the range of 11-16 percent may be
mixed with polypropylene. By maintaining the carbon content in this range, the
carrier does not build up a static charge and does not significantly outgas or
permit its dispersal of carbon on the surface of the semiconductor wafer.