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Protective Cover for Pellicles in a Projection Printing System

IP.com Disclosure Number: IPCOM000049146D
Original Publication Date: 1982-May-01
Included in the Prior Art Database: 2005-Feb-09

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Related People

Kraycir, JR Wojcik, WJ [+details]


This article describes a frame for protecting ultra-thin ultraviolet light transparent pellicles against damage during handling and particularly during insertion and removal in the exposure tool.