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Single Heater Multi-Material Evaporation Source

IP.com Disclosure Number: IPCOM000049149D
Original Publication Date: 1982-May-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Cosgrove, JF Dahlke, GP Lennon, CG Wurms, C [+details]

Abstract

The device shown in the drawings will allow the evaporation of a multiple metal structure onto silicon or other substrate materials from a source assembly axially located on the substrate carrier center line.