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Crucible for Silicon and Titanium Evaporation

IP.com Disclosure Number: IPCOM000049283D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Renken, H [+details]

Abstract

It has been found that crucible problems associated with either silicon or titanium evaporation using RF as a power source can be avoided and overcome by providing a graphite crucible having a lining of pyrolytic graphite. Alternately, the crucible could be formed of pure pyrolytic graphite itself.