Crucible for Silicon and Titanium Evaporation
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09
It has been found that crucible problems associated with either silicon or titanium evaporation using RF as a power source can be avoided and overcome by providing a graphite crucible having a lining of pyrolytic graphite. Alternately, the crucible could be formed of pure pyrolytic graphite itself.