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Plasma Corrosion Inhibition

IP.com Disclosure Number: IPCOM000049329D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

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Related People

Potts, HR [+details]


Semiconductor products may be susceptible to corrosion when any chlorine is left on the product during processing. Residual chlorine can be removed from the product by exposing the product to a plasma with forming gas (hydrogen/nitrogen).