High Resolution, High Throughput Inspection System for Sheet-Like Specimen Using X-Rays
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09
Medium soft X-rays for fast, large area, high resolution non-destructive and contactless inspection of sheet-like structured specimens, such as multilayered ceramic (MLC) greensheets, are employed. The use of X-rays has several advantages over the use of light optical means or E-beam tools. For example, use of X-rays permits a simultaneous inspection of both surfaces. In addition, the vacuum environment can be avoided.