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High Resolution, High Throughput Inspection System for Sheet-Like Specimen Using X-Rays

IP.com Disclosure Number: IPCOM000049339D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Langner, GO [+details]

Abstract

Medium soft X-rays for fast, large area, high resolution non-destructive and contactless inspection of sheet-like structured specimens, such as multilayered ceramic (MLC) greensheets, are employed. The use of X-rays has several advantages over the use of light optical means or E-beam tools. For example, use of X-rays permits a simultaneous inspection of both surfaces. In addition, the vacuum environment can be avoided.