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The location of the plateau within the TV scan waveform, produced by scanning across the meniscus of a growing crystal, is used as a reference point for controlling crystal diameter.
English (United States)
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Technique for Monitoring Diameter Variation in Czochralski Crystal Growth
The location of the plateau within the TV scan waveform, produced by
scanning across the meniscus of a growing crystal, is used as a reference point
for controlling crystal diameter.
Crystal 1 (Fig. 1) is grown by gradually pulling and rotating it by motor and
shaft 2 out of heated melt 3 in crucible 4.
TV camera 5 scans the crystal perimeter and meniscus 6. A section close to
180 degrees of the total perimeter and meniscus can be seen on the screen, and
the entire image is digitized and stored in computer memory. Then the image
intensity along any direction can be extracted using software algorithms. Insert 7
shows the outline of the encircled area of the meniscus 6 as produced on a TV
screen. The image brightness intensity is taken in a radial direction, starting with
the crystal perimeter 8 and proceeding to the edge of the meniscus 9 with the
intermediate positions taken-up by pixels (picture elements) 10.
A typical plot of intensity vs. pixel position, produced by software algorithms
from brightness intensity data collected along the radial direction, is shown in Fig. 2. A plateau 11 is shown in the plot; experience has shown the presence of this
plateau to be reproducible. Therefore, software algorithms can utilize sensing
point 12, which signifies the edge of the plateau as a convenient reference point
for locating the meniscus 6.
The same principle can also be applied to monitoring...