Browse Prior Art Database

Technique for Monitoring Diameter Variation in Czochralski Crystal Growth

IP.com Disclosure Number: IPCOM000049345D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Kim, KM Kran, A Paz, O [+details]

Abstract

The location of the plateau within the TV scan waveform, produced by scanning across the meniscus of a growing crystal, is used as a reference point for controlling crystal diameter.