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Slant Filter Installation In Semiconductor Packaging Clean Room

IP.com Disclosure Number: IPCOM000049429D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Stokes, KH [+details]

Abstract

This filter installation arrangement for clean rooms, such as are used for semiconductor packaging and similar fabrication operations, provides better laminar movement of air within the clean room at lower cost of filters per room and permits ducting for installation of sprinkler heads, lighting, and overhead power lines at less expense. HEPA (High Efficiency Particulate Air) filter panels are arranged at angles of approximately 37 degrees to the ceiling line instead of being laid in a plane therein. Lighting fixtures, power outlets and sprinkler heads are then arranged in the open space between panels.