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Bilayer Metallic Antireflection Mirror

IP.com Disclosure Number: IPCOM000049460D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Ahn, KY Fern, RE Lynt, HN [+details]

Abstract

The wavelength of an all metal bilayer antireflection (AR) film mirror can be simply adjusted as a function of the thickness of Si top film with high selectivity.