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Browse Prior Art Database

Horizontal Sample Attachment For Vertical Sample Ellipsometer

IP.com Disclosure Number: IPCOM000049465D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Chastang, JC Hildenbrand, WW Levanoni, M MacInnes, RD [+details]

Abstract

1. Introduction- In most ellipsometric arrangements the samples are either horizontal or vertical. Sketches of both arrangements (in the so-called PSCA configuration)(*) are shown by Figs. 1 and 2, respectively. Fig. 1 shows a horizontal sample ellipsometric arrangement. Fig. 2 shows a vertical sample ellipsometric arrangement. In general, instruments which require vertical samples do not lend themselves easily to the examination of horizontal samples. Figs. 1 and 2 include sources of a beam, a polarizer P, and a sample to which normal line N is drawn. The reflected beam passes through compensator C and analyzer A to means for detection D.