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Doppler Monitor for Additive/Subtractive Process

IP.com Disclosure Number: IPCOM000049551D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Magill, PJ [+details]

Abstract

Optical monitor system 10 uses the Doppler effect to monitor and/or control the deposition (additive process) or removal (subtractive process) of a layer to or from, as the case might be, a workpiece, such as a printed circuit (PC) board or the like.