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Test Specimen for Plasma Etch Process

IP.com Disclosure Number: IPCOM000049552D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Ruh, WD [+details]

Abstract

A two-piece test specimen is used to evaluate the effectiveness of a known plasma etching process for removing epoxy smear in the vias of a laminated glass-epoxy printed circuit board (PCB).