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Browse Prior Art Database

Wafer Dome Deposition Angle Deviation Tool

IP.com Disclosure Number: IPCOM000049561D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue


Related People

Brown, WW Cosgrove, JF Curry, WJ Lupul, FT Martin, HJ [+details]


The wafer dome deposition angle tool is a device that will insure the accuracy of the evaporant deposition angle that is critical to the processing of semiconductor wafers. Reduced via hole geometries and more accurate thickness distribution for lift-off compatability require accurate fabrication of wafer domes.