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Apparatus for Introducing DI Wafer Samples into an Analyzer Without any Contamination

IP.com Disclosure Number: IPCOM000049583D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Hoffmeister, WW Krogmann, GH [+details]

Abstract

This article describes a closed apparatus which introduces DI water samples, to be analyzed for their organic carbon content, into an analyzer without any contamination.