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This article describes a closed apparatus which introduces DI water samples, to be analyzed for their organic carbon content, into an analyzer without any contamination.
English (United States)
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Apparatus for Introducing DI Wafer Samples into an Analyzer Without any
This article describes a closed apparatus which introduces DI water
samples, to be analyzed for their organic carbon content, into an analyzer without
Carboniferous contaminations, such as humic acids, surfactants, and the like,
considerably contaminate the DI water used to produce semiconductors. Their
analytical detection is effected by photochemical decomposition, followed by
measuring the electrical conductivity to determine the CO(2). Apparatus for such
analyses is commercially available and generally designed for carbon contents
exceeding 1 ppm. The measuring accuracy such apparatus permits is 10 ppb, if
the samples can be introduced into the analyzer without any contamination. The
apparatus used for this purpose is described below.
The bottom part of the apparatus consists of a glass vessel 1 of about 200 ml
contents with a lower discharge cock 2, feed pipe 3 and suction pipe 4 leading to
Bottom part 1 is linked with top part 5 by a ground in joint 8.
Top part 5 is provided with a side tube 10 filled with quartz wool
11 and soda lime 12, which prevents air borne organic material from
entering the apparatus. Top part 5 is also provided with a discharge
cock 9, a 100 ml mark 6 and a sealing cap 7.
For detecting carboniferous contaminations, instrument water, 100 ml which
is absolutely free from carbon, is fed through pipe 3 from the analyzer to bottom
part 1 and mixed with 1 ml 0.05 n H(3)PO(4) for inorganic carbon expulsion. This
quantity of wate...