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Moire Metrical Topography with Micrometer Resolution

IP.com Disclosure Number: IPCOM000049589D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Drollinger, B Jaerisch, W Makosch, G [+details]

Abstract

A moire set up is modified in that the test grating on the sample surface is generated by two plain waves brought to interference in the same area.