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In-Situ, Real-Time Thin-Film Refractive Index and Thickness Monitor

IP.com Disclosure Number: IPCOM000049625D
Original Publication Date: 1982-Jun-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Hewig, GH Jain, K [+details]

Abstract

An optical apparatus for the real-time, in-situ measurement of the refractive index and thickness of a thin film includes a low index film on a prism, as shown in Fig. 1. The apparatus 10 has a laser source 12 that passes a beam of light through a beam expander 14, a window 16 and lens 18 into the prism 20.