Browse Prior Art Database

Ion Implanted Image Monitoring Technique

IP.com Disclosure Number: IPCOM000049705D
Original Publication Date: 1982-Jul-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Gartner, HM Nagarajan, A Sarkary, HG Sharif, AU [+details]

Abstract

A technique is described whereby an ion-implanted resistor photo image is preserved for end of line diagnostics purposes.