Two Phase, Offset Gate, CCD Structure with Two Self Aligned Ion Implants
Original Publication Date: 1982-Jul-01
Included in the Prior Art Database: 2005-Feb-09
Offset gate charge-coupled devices (CCDs) may be fabricated r using either stepped oxides or ion implants to create storage and transfer regions under a single phase electrode. A variety of design/process considerations point to the ion-implant mode as the most desirable. This method, therefore, is normally employed in creating the two regions under the second set of phase electrodes of the two-phase offset gate structure.