The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
A phase-sensitive optical detection method is proposed for measuring refractive indices and layer boundaries in multilayer film structures that is particularly useful during layer growth or etching.
English (United States)
This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately
53% of the total text.
Page 1 of 2
Optical In-Situ Determination of Multilayer Film Characteristics
A phase-sensitive optical detection method is proposed for measuring
refractive indices and layer boundaries in multilayer film structures that is
particularly useful during layer growth or etching.
In Fig. 1 the output beam 2 of laser 1 is directed (by beam splitter 3) to
birefringent crystal 4, where it is split up in an ordinary beam, reference beam 5,
and an extraordinary beam, measurement beam 6. Reference beam 5 is
reflected at a constant reference plane, e.g., a mirror 7 attached to crystal 4.
Measurement beam 6 is directed to a multilayer system 8 at a location that is
subject to etching (or growth). In the example of Fig. 1, the layer system consists
of an SiO(2) layer sandwiched between a top poly-Si layer and a Si substrate; in
crater 9, the poly-Si layer is continually removed by an impinging ion beam 10
used for a reactive ion etching (RIE) or secondary ion mass spectroscopy
(SIMS). Measurement beam 6 is reflected partly at the interfaces air-poly-Si,
poly-Si-SiO(2) and SiO(2)Si. The reflected parts of measurement beam 6 are
recombined with reference beam 5 when again passing birefringent crystal 4.
The relative phase difference of the recombined measurement and reference
beams due to their different optical paths is measured in electro-optic phase
detector 11 whose operation is described in detail in German Patent Application
The output signal (phi)(m)of phase detector 11 over the sputter time is shown
in Fig. 2. By comparison with the SIMS-signal (dashed curve) it is apparent...