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Optical In-Situ Determination of Multilayer Film Characteristics

IP.com Disclosure Number: IPCOM000049732D
Original Publication Date: 1982-Jul-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Hinkel, H Kaus, G Kempf, J Wagner, H [+details]

Abstract

A phase-sensitive optical detection method is proposed for measuring refractive indices and layer boundaries in multilayer film structures that is particularly useful during layer growth or etching.