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Reciprocating Air Track Shuttle

IP.com Disclosure Number: IPCOM000049848D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Scarafino, AJ Zaccaria, BA [+details]

Abstract

A split air track arrangement is provided for feeding wafers in and out of process stations synchronously.