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Metal Foil Preparative Method

IP.com Disclosure Number: IPCOM000049858D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Block, ML Clark, R [+details]

Abstract

The use of very thin foils (e.g., less than 1000 Angstroms) is increasing. However, there is no completely satisfactory technique for forming large size thin films of uniform thickness. One typical use for thin films is in masks for X-ray lithography which requires thin films, in some instances only 500 Angstroms thick.