Browse Prior Art Database

RIE of Metal Composites to Form Circuitry on Ceramics

IP.com Disclosure Number: IPCOM000049887D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Schaible, PM Suierveld, J [+details]

Abstract

A conductive pattern is formed on a ceramic substrate by evaporating a metal blanket layer on the substrate, selectively covering the metal layer with an appropriate mask such as magnesium oxide, and reactive ion etching (RIE) the metal layer.