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RIE of Metal Composites to Form Circuitry on Ceramics Disclosure Number: IPCOM000049887D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-09

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Schaible, PM Suierveld, J [+details]


A conductive pattern is formed on a ceramic substrate by evaporating a metal blanket layer on the substrate, selectively covering the metal layer with an appropriate mask such as magnesium oxide, and reactive ion etching (RIE) the metal layer.