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Air-Knife Particle Detection System

IP.com Disclosure Number: IPCOM000049890D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-09

Publishing Venue

IBM

Related People

Authors:
Ross, T [+details]

Abstract

Two collimated, oppositely directed light beams are used to examine green sheet surfaces at glancing angles of incidence to visually detect particle contamination.