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Two collimated, oppositely directed light beams are used to examine green sheet surfaces at glancing angles of incidence to visually detect particle contamination.
English (United States)
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Air-Knife Particle Detection System
Two collimated, oppositely directed light beams are used to examine green
sheet surfaces at glancing angles of incidence to visually detect particle
By using various cleaning techniques, such as air knives, the green sheets
are cleaned. It is then necessary to inspect the sheet for particle contamination.
The use of a special lighting system enables an operator to visually scan a green
sheet after air-knife cleaning. The system uses two sources of high intensity light
directed through respective collimating lenses which projects the light at low
angles to the green sheet. The green sheet becomes dark and particles above
one mil scatter light to form light points which can be clearly seen by an operator.
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