Sensitized Poly(Olefin Sulfones) as Dry Developable, Mid and Deep UV Photoresists
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-09
Poly(butene-1-sulfone) can be used as a dry developable, positive tone photoresist with fairly high resolution and with high sensitivity. With a proper choice of photosensitizer, the resists will be used as mid-UV photoresist, and/or deep-UV photoresist with positive tone; p-NO(2)-pyridine N-oxide for mid-UV, pyridine N-oxide as a deep UV sensitizer, or an aromatic bisazide which is extracted from a negative-tone deep UV photoresist. These are cross-linking agents, but here they are used as positive working photosensitizers, With an increase of photosensitizer concentrations, the resist plasma resistance increases. Because poly-(butene-1-sulfone) does NOT have any UV-absorption, the primary photoreactions must be originated by the photosensitizers. By choosing suitable sensitizers, a whole range of UV-light can can be used.