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Enhanced Polycide Structures

IP.com Disclosure Number: IPCOM000050123D
Original Publication Date: 1982-Sep-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Campbell, DR Sullivan, MJ [+details]

Abstract

Described is a polycide structure which yields a combination of good film adhesion with excellent electrical conductivity.