Browse Prior Art Database

Off Normal Hole Size Detection by Etch Breakthrough

IP.com Disclosure Number: IPCOM000050158D
Original Publication Date: 1982-Sep-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Salvas, WA [+details]

Abstract

This method will detect off/normal hole size locations in etched metal masks.