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Thermocouple Heat Control Radiation Shield

IP.com Disclosure Number: IPCOM000050291D
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Beermunder, K Brainard, EJ Brandt, SL [+details]

Abstract

This is a proposal for an infrared radiation thermocouple shield. The radiation shield, attached to the heat control sensors, establishes the same heat characterization as the product wafers and, thus, allows an improved control of the temperature characteristics in any vacuum system.