Non-diffused Chip Resistors
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10
Traditionally in semiconductor chips, resistors are formed by diffusion or ion implementation in the Si portion of the chip. There can be several thousand resistors on a chip, which implies a substantial amount of Si real estate and twice as many resistor contacts to be properly etched. All of this Si wafer real estate can be saved and resistor contacts eliminated by making the resistors an inherent part of the interconnecting chip metallization. The value of the proposed structure lies in being able to provide a masterslice more densely packed with transistor and diodes and providing the designer with the flexibility of choosing both the number and location of the resistors in his particular design.