Alignment Beam Splitter Cube
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10
This article concerns an improved optical beamsplitter used for visually aligning multiple objects, for example, a semiconductor chip and a substrate, during chip mounting. The improved beamsplitter features a modified construction and beam path that avoids erroneous alignment caused by defects which may arise in the beamsplitter.