Browse Prior Art Database

Manual X-Y Wafer Positioner

IP.com Disclosure Number: IPCOM000050338D
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Cadwallader, RH [+details]

Abstract

Semiconductor wafers are quite often tested by being mounted on an X-Y table for movement between various positions. For example, the wafer might be moved relative to an optical system for measuring the thickness of the wafer or of an epitaxial layer. Shown in the drawing is a manually actuated positioner adapted to be connected to one platform of an X-Y table for positioning a wafer mounted in the table, in a plurality of predetermined positions.