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Spacers can be used to control the gap between two refractory metal electrodes during fusing of dielectric material in the gap at high temperatures.
English (United States)
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Process to Fabricate Microweld Electrodes
Spacers can be used to control the gap between two refractory metal
electrodes during fusing of dielectric material in the gap at high temperatures.
The two electrodes 10 are rough-machined or partially completed in one
direction for added stiffness and machined to size in the other direction, as
shown in Fig. 1.
The extra metal 12 left on each electrode is to prevent the electrode's
deformation during furnace reflow. As is shown in Fig. 2, two strips of quartz 14
are then deposited (using a masking technique and vacuum sputtering
apparatus) on the electrodes to serve as spacers. The spacers have a softening
point which is higher than the melting point of the glass or ceramic cement to be
placed in the gap, thus preventing the two electrodes from coming in physical
contact during the furnace bonding operation.
The glass or ceramic cement 16 is spread over the gap side of each
electrode and around the quartz spacers while the two electrodes are held
spaced apart in an alignment fixture. Closing the fixture brings the two
electrodes together, leaving the proper gap in between them as shown in Fig. 3.
After the dielectric fusion or curing cycle is completed, the now one-piece
welding tip is ground and dressed to its final shape and dimensions using the
appropriate grinding wheel and abrasive file.
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