Method for Etching Via Holes in SiO
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10
When SiO is deposited by evaporation over thin film patterns having steep edges, the SiO in the vicinity of the step is of a lower density than the remaining SiO and etches more rapidly in HF. This effect is used to etch via holes in SiO.