Printhead Using Aluminum Conductive Paths in Silicon
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10
A thermal print head may be fabricated using thermomigration of aluminum (Al) in silicon (Si) to form a conductive path, as described in J. App. Phys. 47, 2332 (June 1976). Al lines can be formed through 100 mil Si with separations of the order of 100 Microns each with a line resistance of the order of 200 ohms per 3 mils of filament. The outer layer of each printing surface or pel (picture element) may be made up of a ruthenium dioxide (RuO(2)) film over a titanium dioxide (TiO(2)) interlayer in order to impart anticorrosive properties and mechanical wear resistance.