Growth of Very Thin Magnetic Garnet Thin Films
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10
The various current schemes for bubble devices require reproducible growth of very thin (0.10.5 micrometers) magnetic garnet films on garnet substrates (for submicron storage layers) or magnetic garnet layers for drive layers. Thickness and magnetic properties of these films depend on the liquid phase epitaxial growth temperature, the growth rate, and the growth time. Usual uncertainties in these parameters in conjunction with a normal melt result in a thickness variation of the order of +/- 0.1 micrometer, which is clearly unacceptable in view of the +10 percent tolerance for film thickness of 1 micrometer or less.