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Method of Identifying Ion Implantation Damage Not Removable by Annealing

IP.com Disclosure Number: IPCOM000050468D
Original Publication Date: 1982-Nov-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Hagmann, D [+details]

Abstract

Ion implantation damage not removable by annealing is identified by Rs (sheet resistivity) measurements.