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Negative Ion Source

IP.com Disclosure Number: IPCOM000050750D
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Cuomo, JJ Harper, JME Keller, JH McKenna, CM [+details]

Abstract

A solid sputter ion source is described for extracting negative ions by selecting materials with proper negativity.