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GaAs Integrated Circuit Substrates

IP.com Disclosure Number: IPCOM000050757D
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10

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Hovel, HJ McKoy, TE [+details]


GaAs layers intended for integrated circuits can be improved with an intermediate layer between the integrated circuit device layer and the substrate that accommodates lattice matching and inhibits the effect of a low resistivity substrate adjacent to the device layer.