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Browse Prior Art Database

Miniature Chuck Matching Fixture

IP.com Disclosure Number: IPCOM000050836D
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Messina, GP Ruder, WS [+details]

Abstract

This article concerns an improved jig for use in aligning chucks of a lxx and 2xx Perkin Elmer exposure tool.