Interface Passivation Structure for Replaceable Chip Connection
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10
Separating and passivating interface metallurgy from the edge of an insulator layer eliminates an attack path by which contact mercury tends to short circuit an underlying metal layer in a microelectronic circuit. In certain microelectronic circuits, such as Josephson circuits, mercury can be used as a chip contact material. Mercury, however, is corrosive to superconducting metals such as lead and niobium. To prevent the mercury from attacking an underlying metal layer, an interface metallurgy structure is often used. In structures such as that shown in Fig. 1, an attack path indicated by the heavy arrow can exist along the interface between SiO layer 12 and interface layer 13 to metal layer 14. Mercury from Hg mass 15 finds its way to metal layer 14.