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Browse Prior Art Database

Smoothness Control for Josephson Edge Junctions

IP.com Disclosure Number: IPCOM000050932D
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10

Publishing Venue

IBM

Related People

Authors:
Chen, MM Drake, RE Raider, SI Wang, RH [+details]

Abstract

Post-baking the photoresist stencil after development improves the smoothness of the niobium (Nb) edge surface which is to be the site of a Josephson junction.