Method of Fabricating a Compact Transistor Structure
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10
This is a proposal for a very compact bipolar transistor structure with polysilicon base and collector contacts. A method for realizing this transistor structure is described with reference to Figs. 1-7, with a cross-section of the resulting transistor structure being shown in Fig. 7. Geometries of some of the important masks that are used in the described method are shown in Fig. 8.